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MPS50SV-5 Datasheet(PDF) 3 Page - AEROTECH US. ALL RIGHTS RESERVED. |
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MPS50SV-5 Datasheet(HTML) 3 Page - AEROTECH US. ALL RIGHTS RESERVED. |
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3 / 7 page ![]() LIFT STAGES | MPS-SV SERIES aerotech.com MPS-SV Series Specifications 0 10 20 30 40 50 60 −50 0 50 100 150 200 250 300 350 400 450 500 550 Time (s) The MPS-SV series exhibit a best-in-class minimum incremental motion (resolution) of 50 nm. Shown is a 50 nm bidirectional step plot of a MPS75SV-5-BS-M1 stage. 0 1 2 3 4 5 6 7 0 25 50 75 100 125 150 Offset Distance (mm) Lr Lp 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 0 25 50 75 100 125 150 175 200 Offset Distance (mm) Lr Lp MPS75SV load curves MPS50SV load curves |
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