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FS2012 Datasheet(PDF) 7 Page - Renesas Technology Corp |
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FS2012 Datasheet(HTML) 7 Page - Renesas Technology Corp |
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7 / 10 page ![]() FS2012 Series Datasheet © 2018 Integrated Device Technology, Inc. 7 August 24, 2018 Example: Output data = 1F 2A (hex) Then = (1F + 2A) = 1F2A = 7978 (decimal) Flow (Liquid) = 7978/10 = 797.80 SCCM 9. Analog Output The voltage output is ratiometric to the full scale span. Use the following conversion for the range examples. Gas (SLPM) Typical OFFZERO_NG = 0.045V 0 to 2 SLPM: Flow = 0.4 [Output (V) – OFFZERO_NG] 0 to 10 SLPM: Flow = 2 [Output (V) – OFFZERO_NG] Liquid (SCCM) Typical OFFZERO_LQ = 0.045V 0 to 500 SCCM: Flow = 100 [Output (V) – OFFZERO_LQ] 0 to 1000 SCCM: Flow = 200 [Output (V) – OFFZERO_LQ] Figure 2. Analog Output Example |
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