PLANARHD Datasheet(PDF) - AEROTECH US. ALL RIGHTS RESERVED.

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PLANARHD Datasheet (PDF) - AEROTECH US. ALL RIGHTS RESERVED.

PLANARHD Datasheet PDF - AEROTECH US. ALL RIGHTS RESERVED.


No. de pieza	PLANARHD

Descarga	PLANARHD Descarga

Tamaño del archivo	792.9 Kbytes

Page	3 Pages

Fabricante Electrónico	AEROTECH [AEROTECH US. ALL RIGHTS RESERVED.]

Página de inicio	https://www.aerotech.com/

Logo

Descripción Electrónicos

Two-Axis Air-Bearing Direct-Drive Linear Stage

PLANARHD Datasheet (PDF)

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PLANARHD Datasheet PDF - AEROTECH US. ALL RIGHTS RESERVED.


No. de pieza	PLANARHD

Descarga	PLANARHD Click to download

Tamaño del archivo	792.9 Kbytes

Page	3 Pages

Fabricante Electrónico	AEROTECH [AEROTECH US. ALL RIGHTS RESERVED.]

Página de inicio	https://www.aerotech.com/

Logo

Descripción Electrónicos	Two-Axis Air-Bearing Direct-Drive Linear Stage

PLANARHD Datasheet (HTML) - AEROTECH US. ALL RIGHTS RESERVED.

PLANARHD Datasheet HTML 1Page - AEROTECH US. ALL RIGHTS RESERVED.

PLANARHD Datasheet HTML 2Page - AEROTECH US. ALL RIGHTS RESERVED.

PLANARHD Datasheet HTML 3Page - AEROTECH US. ALL RIGHTS RESERVED.

PLANARHD Detalles de producto

KEY FEATURES:

M AXIMIZES THROUGHPUT with
velocity to 2 m/s & acceleration to 5 g
Incorporates active yaw &
orthogonality control for MAXIMUM
PRECISION
IMPROVES TURNAROUND TIME
with dual linear-motor H-bridge design
Maintains thermal stability with
optional AIR- & WATER-COOLING
FEATURES for optimal performance
Optimizes move-and-settle time &
contouring performance with available
ENHANCED THROUGHPUT
MODULE
Available with LASER
INTERFEROMETER FEEDBACK for
best performance at the wafer plane

Número de pieza similar - PLANARHD

Fabricante Electrónico	No. de pieza	Datasheet	Descripción Electrónicos
AEROTECH US. ALL RIGHTS...	PLANARHDX-450-450	379Kb / 5P	Two Axis, Silicon Carbide, Planar Air-Bearing Stage
	PLANARHDX-600-600	379Kb / 5P	Two Axis, Silicon Carbide, Planar Air-Bearing Stage
	PLANARHDX-750-750	379Kb / 5P	Two Axis, Silicon Carbide, Planar Air-Bearing Stage

Descripción similar - PLANARHD

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